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MERCURY PROBES MDC MERCURY PROBES are precision instruments that enable rapid, convenient, and non-destructive measurements of semiconductor samples by probing wafers with mercury to form contacts of well-defined area.
MDC MERCURY PROBES may be connected to C-V plotters, computerized semiconductor measurement systems, curve tracers, or doping profilers for a variety of measurements. MERCURY PROBES eliminate time consuming metalization and their convenience make them ideal tools for production process monitoring applications. Their accuracy and reproducibility make them attractive for R&D applications. There are two types of Mercury Probes available. Standard and Mapping versions. All MDC Mercury Probes make three contacts to the sample wafer employing the unique MDC dot-ring configuration. This allows contact to be made in both front-back and front-front modes allowing for measurements on semi-insulating substrates. Also, a guard ring can be configured. The 802B series of Mercury Probes includes an electronic valve assembly, integrated vacuum pump, vacuum regulator and gauge for more precise vacuum control. The standard probes come in three standard diameters for the measurement platform: Model 802B-150 - 6" (150 mm) Model 802B-200 - 8" (200 mm). Model 862B - 12" (300 mm). Model 862 Mapping Mercury Probe allows for repeatable contacts over a wafer using manual X and Y positioning controls. Mapping Mercury Probe uses a 12" (300 mm) diameter platform.
Contact configuration of the MDC Mercury Probes (Nominal contact diameter is 760 microns.)
OPTIONS and UPGRADES
Please contact the engineers at MDC for more information.
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