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HOT CHUCKS Probe stations to suit all measurement requirements whether production, engineering or research. See individual data sheets for more details.QuietCHUCK System
The DuoCHUCK Integrated Hot Chuck System: Designed for high throughput CVBT mobile ion tests. Contains two hot chucks and all associated control, multiplexing, and stress bias circuitry to make measurements on one to five C-V dots on each chuck. The DuoCHUCK has 10 times the capacity of a conventional single dot probe station. DOWNLOAD LITERATURE
For multiple site measurements. Facilitates mapping of parameters like Vfb, lifetime, oxide integrity, or interface trap density. Special prober software includes expanded multiple test menus, data storage and statistical analyses.
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Wafer Area Prober
The Model 323, Wafer Area Prober System is designed to work with wafers up to 300 mm (12"). The system is available with integrated video microscope and specially designed dark box to make for easy access and small footprint.
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